Microelectromechanical gyroscope with enhanced rejection of acceleration noises

ABSTRACT

An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration.

BACKGROUND

1. Technical Field

The present disclosure relates to a microelectromechanical structure, in particular a gyroscope sensitive to yaw angular accelerations, having enhanced mechanical characteristics, in particular in the rejection of acceleration noise.

2. Description of the Related Art

As is known, micromachining techniques enable manufacturing of microelectromechanical structures or systems (MEMS) within layers of semiconductor material, which have been deposited (for example, a layer of polycrystalline silicon) or grown (for example, an epitaxial layer) on sacrificial layers, which are removed by chemical etching. Inertial sensors, accelerometers, and gyroscopes built using this technology are having a growing success, for example, in the automotive field, in inertial navigation, or in the sector of portable devices.

In particular, known to the art are integrated gyroscopes made of semiconductor material built using MEMS technology.

These gyroscopes operate on the basis of the theorem of relative accelerations, exploiting the Coriolis acceleration. When an angular velocity is applied to a mobile mass that moves with a linear velocity, the mobile mass “feels” an apparent force, referred to as the “Coriolis force”, which determines a displacement in a direction perpendicular to a direction of the linear velocity and to an axis about which the angular velocity is applied. The mobile mass is supported via springs that enable its displacement in the direction of the apparent force. On the basis of Hooke's law, the displacement is proportional to the apparent force so that, from the displacement of the mobile mass, it is possible to detect the Coriolis force and a value of the angular velocity that has generated it. The displacement of the mobile mass can, for example, be detected capacitively, by determining, in resonance conditions, capacitance variations caused by movement of mobile electrodes, which are fixed with respect to the mobile mass and are comb-fingered with fixed electrodes.

Published U.S. Patent Application Nos. US2007/0214883, US2009/0064780, and US2009/0100930, filed by the present applicant, disclose a microelectromechanical integrated sensor with rotary driving movement and sensitive to yaw angular velocities.

The microelectromechanical sensor comprises a single driving mass, anchored to a substrate and actuated with rotary motion. Through openings are provided within the driving mass, and corresponding sensing masses are set in the through openings; the sensing masses are enclosed within the overall dimensions of the driving mass, are suspended with respect to the substrate, and are connected to the driving mass via flexible elements. Each sensing mass is fixed with respect to the driving mass during the rotary motion, and has a further degree of freedom of movement as a function of an external stress, in particular a Coriolis force, acting on the sensor. The flexible elements, thanks to their particular construction, enable the sensing masses to perform a linear movement of detection in a radial direction belonging to the plane of the sensor, in response to a Coriolis acceleration. This movement of detection is substantially uncoupled from the actuation movement of the driving mass. The microelectromechanical structure, in addition to being compact (in so far as it envisages a single driving mass enclosing in its overall dimensions a number of sensing masses), enables, with minor structural modifications, a uniaxial gyroscope, a biaxial gyroscope, or a triaxial gyroscope (and/or possibly an accelerometer, according to the electrical connections implemented) to be obtained, at the same time ensuring an excellent uncoupling of the driving dynamics from the detection dynamics.

FIG. 1 shows an exemplary embodiment of a uniaxial microelectromechanical gyroscope, designated by 1, provided according to the teachings contained in the aforesaid patent applications.

The gyroscope 1 is provided in a die 2, comprising a substrate 2 a made of semiconductor material (for example, silicon), and a frame 2 b; the frame 2 b defines inside it an open region 2 c, which overlies the substrate 2 a and is designed to house detection structure of the gyroscope 1 (as described in detail hereinafter). The open region 2 c has a generally square or rectangular configuration in a horizontal plane (in what follows, plane of the sensor xy), defined by a first horizontal axis x and by a second horizontal axis y, which are fixed with respect to the die 2; the frame 2 b has sides substantially parallel to the horizontal axes x, y. Die pads 2 d are arranged along one side of the frame 2 b, aligned, for example, along the first horizontal axis x. In a way not illustrated, the die pads 2 d enable the detection structure of the gyroscope 1 to be electrically contacted from the outside.

The gyroscope 1 comprises a driving structure, housed within the open region 2 c and formed by a driving mass 3 and by a driving assembly 4.

The driving mass 3 has, for example, a generally circular geometry with radial symmetry, with a substantially planar configuration with main extension in the plane of the sensor xy, and negligible dimension, with respect to the main extension, in a direction parallel to a vertical axis z, forming with the first and second horizontal axes x, y a set of three orthogonal axes, fixed with respect to the die 2. The driving mass 3 defines at a central empty space 6, a center O of which coincides with the centroid and a center of symmetry of the entire structure.

The driving mass 3 is anchored to the substrate 2 a by means of a first anchorage 7 a set at the center O, to which it is connected through first elastic anchorage elements 8 a. The driving mass 3 is possibly anchored to the substrate 2 a by means of further anchorages (not illustrated), set outside the same driving mass 3, to which it is connected by means of further elastic anchorage elements (not illustrated), for example, of the folded type. The first and further elastic anchorage elements enable a rotary movement of the driving mass 3 about an axis of actuation passing through the center O, parallel to the vertical axis z and perpendicular to the plane of the sensor xy, with a driving angular velocity {right arrow over (Ω)}_(a).

The driving mass 3 has a pair of through openings 9 a, 9 b, aligned in a radial direction, for example, along the second horizontal axis y, and set on opposite sides with respect to the empty space 6; the through openings 9 a, 9 b have in plan view a substantially rectangular shape, with main extension in a direction transverse to the radial direction.

The driving assembly 4 comprises a plurality of driven arms 10, extending externally from the driving mass 3 in a radial direction and arranged at equal angular distances apart, and a plurality of first and second driving arms 12 a, 12 b, extending parallel to, and on opposite sides of, respective driven arms 10. Each driven arm 10 carries a plurality of first electrodes 13, extending perpendicular to, and on both sides of, the same driven arm 10. Furthermore, each of the first and second driving arms 12 a, 12 b carries respective second electrodes 14 a, 14 b, extending towards the respective driven arm 10, and comb-fingered with the corresponding first electrodes 13.

The first driving arms 12 a are set all on one side of the respective driven arms 10, and are all biased at a first voltage; likewise, the second driving arms 12 b are all set on the opposite side of the respective driven arms 10, and are all biased at a second voltage. A driving circuit (not illustrated) is connected to the second electrodes 14 a, 14 b to apply the first and second voltages and determine, by means of mutual and alternating attraction of the electrodes, an oscillatory rotary motion of the driving mass 3 about the driving axis, at a given oscillation frequency and driving angular velocity {right arrow over (Ω)}_(a).

The gyroscope 1 further comprises a pair of acceleration sensors with axis parallel to the aforesaid radial direction, and in particular a pair of sensing masses 15 a, 15 b housed within the through openings 9 a, 9 b; the sensing masses 15 a, 15 b have, for example, a generally rectangular shape with sides parallel to corresponding sides of the through openings 9 a, 9 b, are suspended with respect to the substrate 2 a, and are connected to the driving mass 3 via elastic supporting elements 18. The elastic supporting elements 18 depart, for example, from the opposite major sides of each sensing mass in a radial direction. In particular, the elastic supporting elements 18 are rigid with respect to the motion of actuation of the driving mass 3 (in such a way that the sensing masses 15 a, 15 b will follow the driving mass 3 in the rotary movement), and also enable a linear movement of the respective sensing masses in the aforesaid radial direction. Furthermore, mobile electrodes 20 are coupled to the second sensing masses 15 a, 15 b, extending, for example, from respective minor sides, in a direction orthogonal to the radial direction; the mobile electrodes 20 form sensing capacitors with plane and parallel plates with respective first and second fixed electrodes 22 a, 22 b, anchored to the driving mass 3. In particular, each mobile electrode 20 forms a first sensing capacitor C₁ with a respective first fixed electrode 22 a (for example, the radially more internal one with respect to the center O), and a second sensing capacitor C₂ with a respective second fixed electrode 22 b (for example, the radially more external one with respect to the center O).

In use, the gyroscope 1 is able to detect an angular velocity {right arrow over (Ω)}_(z) (of yaw), acting about the vertical axis z. In particular, this angular velocity {right arrow over (Ω)}_(z) to be detected generates a Coriolis force {right arrow over (F )}_(C) on the sensing masses 15 a, 15 b oriented in a radial direction (hence directed as a centripetal force acting on the same masses), causing displacement of the sensing masses and a capacitive variation of the corresponding sensing capacitors C₁, C₂. The value of the capacitive variation is proportional to the angular velocity {right arrow over (Ω)}_(z), which can thus be determined in a per-se known manner via a reading circuit, operating according to a differential scheme. In particular, appropriate connections are provided between the fixed electrodes 22 a, 22 b and the mobile electrodes 20 in such a way that the difference between electrical quantities correlated to the variations of the first and second sensing capacitors C₁, C₂ are amplified in a differential way.

In particular, in the presence of the Coriolis force due to a yaw angular acceleration acting on the structure, the sensing masses 15 a, 15 b move in phase opposition in the radial direction (in other words, they displace in opposite senses, or orientations, with respect to the radial direction) so that the differential reading electronics generates an amplified electrical output quantity. Instead, external accelerations acting on the structure in the radial direction (for example, accelerations due to environmental noise) cause a movement in phase of the sensing masses 15 a, 15 b, which consequently is not read by the reading electronics (given that it does not cause an appreciable output).

Basically, the external accelerations are ideally rejected automatically due to the differential reading. In fact, whereas the useful Coriolis signal tends to unbalance the sensing masses 15 a, 15 b in opposite radial directions, external accelerations determine variations with the same sign (or sense). By means of the difference between the detection signals generated by the two acceleration sensors it is thus possible to measure the Coriolis contribution and reject the spurious accelerations.

The rotary driving motion also generates a centrifugal acceleration, which acts upon the sensing masses 15 a, 15 b, substantially in a way similar to the aforesaid Coriolis acceleration (i.e., causing a displacement thereof in opposite directions). However, the centrifugal acceleration causes a contribution at output having a frequency that is twice that of the Coriolis acceleration, and can consequently be appropriately filtered by the reading electronics.

Even though the gyroscope described in the aforesaid patent applications represents a considerable improvement as compared to other structures of a known type, it is not altogether optimized from the standpoint of the electrical characteristics and noise immunity. In particular, in given real operating conditions, it is not perfectly immune to external accelerations (for example, noise accelerations), and also to the effects of the centrifugal acceleration acting on the structure on account of the rotary driving motion.

BRIEF SUMMARY

The present disclosure provides a microelectromechanical gyroscope structure having sensitivity to external acceleration noise and to centrifugal acceleration. The gyroscope structure includes a driving mass configured to be actuated in a plane with a driving movement; first and second elastic anchorage elements anchoring the driving mass to a substrate; and first and second elastic supporting elements. The structure also includes a first sensing mass and a second sensing mass suspended within said driving mass and respectively coupled to the driving mass via the first and second elastic supporting elements, respectively. The sensing masses are configured to move with said driving mass in said driving movement and re configured to perform respective detection movements in response to an angular movement of the driving mass. The structure further includes elastic coupling elements coupling the sensing masses to each other and configured to couple modes of vibration of the sensing masses.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

For a better understanding of the present disclosure, preferred embodiments are now described, purely by way of non-limiting example and with reference to the attached drawings, wherein:

FIG. 1 shows a schematic top plan view of a microelectromechanical gyroscope, of a known type;

FIG. 2 is a schematic representation of the elastic connections of sensing masses of the gyroscope of FIG. 1;

FIGS. 3 a, 3 b and 4 a, 4 b show plots of electrical quantities in the gyroscope of FIG. 1;

FIG. 5 shows a schematic top plan view of a microelectromechanical gyroscope according to a first embodiment of the present disclosure;

FIG. 6 is a schematic representation of the elastic connections of sensing masses of the gyroscope of FIG. 5;

FIGS. 7 a, 7 b and 8 a, 8 b show plots of electrical quantities corresponding to the gyroscope of FIG. 5;

FIG. 9 shows a schematic top plan view of a second embodiment of the microelectromechanical gyroscope;

FIGS. 10, 11 a, and 11 b show progressive enlargements of portions of elements of the gyroscope of FIG. 9;

FIGS. 12 a and 12 b show plots of electrical quantities in the gyroscope of FIG. 9;

FIG. 13 shows a further embodiment of the present disclosure, corresponding to a triaxial gyroscope; and

FIG. 14 shows a simplified block diagram of an electronic device provided with a microelectromechanical gyroscope according to the present disclosure.

DETAILED DESCRIPTION

The present applicant has realized, and verified experimentally, that non-perfect immunity to external acceleration noise afflicting the previously described gyroscope can be attributed to possible process variations (spread), and in particular to possible differences in the mechanical characteristics of the sensing masses and of the corresponding elastic elements, which can derive from this spread.

In detail, as shown in FIG. 2 (where the elastic connections between the sensing masses 15 a, 15 b and the driving mass 3 through the elastic supporting elements 18 are represented schematically), the modes of vibration of the sensing masses 15 a, 15 b are uncoupled from one another and ideally are at the same frequency.

Due to the process spread, the resonance frequencies of the two sensing masses 15 a, 15 b may, however, not be perfectly coincident (for example, they may differ from one another by 10-20 Hz), and this causes, for high factors of merit Q, a poor rejection to the external acceleration noise. In fact, external accelerations having a frequency close to the resonance frequencies of the sensing masses 15 a, 15 b can generate responses considerably different in the two sensing masses, thus generating a non-zero output from the corresponding reading electronics (even though the differential scheme adopted is ideally able to reject these noises). Considering that the resonance frequency of the sensing masses has typical values in the region of 4-5 kHz, it is evident that also environmental noise with audio frequency can generate, for the reasons set forth above, even considerable output noises.

The above behavior has been verified by the present applicant by means of appropriate numerical simulations. FIGS. 3 a and 3 b show the results of numerical processing in which a process spread was simulated by applying a difference of 1% in the rigidity of the elastic supporting elements 18 associated to the sensing masses 15 a, 15 b, and a random displacement noise of the anchorage 7 a (and of the possible further anchorages) of the driving mass was applied to simulate an external acceleration excitation. In particular, FIGS. 3 a and 3 b show, respectively, in linear and logarithmic scale, the output OUT of the reading electronics of the gyroscope 1 (and thus the result of the operations of amplification and demodulation of the signals at output from the sensing capacitors), whilst FIGS. 4 a and 4 b show, respectively, the magnitude (Mag) and the phase of the mechanical transfer function of the sensing masses 15 a, 15 b. These graphs highlight the presence of two distinct frequency peaks set at approximately 20 Hz apart, due to the different resonance frequencies of the two sensing masses 15 a, 15 b, and also the presence of a non-zero output from the reading electronics in the presence of noise acceleration (which could have values that can even be comparable with the values assumed during detection of angular accelerations).

To solve the aforesaid problems, one embodiment of the present disclosure envisages mechanical coupling (in particular via appropriate elastic elements) of the two sensing masses so as to couple their detection vibration modes.

In particular (reference may be made to FIG. 5, where the same reference numbers are used for designating elements similar to others already described previously), the microelectromechanical gyroscope, here designated by 30, differs from the gyroscope 1 of FIG. 1 substantially in that it comprises elastic coupling elements 32 a, 32 b designed to couple the sensing masses 15 a, 15 b elastically to one another.

In this case, a single through opening is present, here designated by 34, also coinciding with the empty space, here designated by 6′, defined at the center of the driving mass 3 (here having the shape of a circular frame). Located within the through opening 34 are both of the sensing masses 15 a, 15 b, and the various elastic elements designed to ensure coupling and mechanical support thereof via connection to the driving mass 3.

In greater detail, the elastic coupling elements 32 a, 32 b are associated with each sensing mass 15 a, 15 b, respectively; the elastic coupling elements 32 a, 32 b depart, for example, from a major side of the respective sensing mass on an opposite side with respect to the elastic supporting elements 18 towards the center O (here just one elastic supporting element 18 is present for each sensing mass). The elastic coupling elements 32 a, 32 b are connected together via a connection body 35, set in a central position, for example, at the center O. The connection body 35 is configured so as to have substantially negligible weight and dimensions, in particular if compared with those of the same sensing masses and of the elastic elements. As shown in the schematic representation of FIG. 6, the connection body 35, in addition to being connected to the sensing masses 15 a, 15 b, is connected to the driving mass 3 via further elastic supporting elements 36. The further elastic supporting elements 36, for example, constituted by springs of a folded type, extend, for example, in a direction transverse to the radial direction of alignment of the sensing masses 15 a, 15 b (coinciding with the direction of extension of the elastic coupling elements 32 a, 32 b), at the center O. In particular, the further elastic supporting elements 36 operate to further constrain the sensing structure to the driving mass 3, in order to increase the rigidity of the sensing masses 15 a, 15 d with respect to translation along the vertical axis z.

In this case, the elastic anchorage elements of the driving mass 3 are moreover arranged in a different way within the empty space 6′. For example, four anchorages 7 a′ are provided, extending in pairs on either side of the further elastic supporting elements 36, to which the driving mass 3 is connected by means of respective elastic anchorage elements 8 a′, extending radially, in a way converging towards the center O.

The elastic coupling elements 32 a, 32 b have, in use, the function of coupling the movements of vibration of the sensing masses 15 a, 15 b, giving rise to two different separate vibration modes of the resulting mechanical sensing structure. In particular, a first vibration mode, in phase, and a second vibration mode, in phase opposition, are generated, having resonance frequencies that are clearly separate from one another. In both cases, the two sensing masses 15 a, 15 b vibrate at the same frequency. It is consequently convenient, by the reading electronics (here appropriately modified), to reject the in-phase vibration mode linked to the noise accelerations, and preserve, for the subsequent processing operations, just the vibration mode in phase opposition representing the angular accelerations to be detected. In particular, noise rejection is principally associated to a differential type reading, where the in-phase vibration mode does not generate a significant capacitive variation for the reading electronics.

FIGS. 7 a and 7 b show the results of a numerical processing similar to the one previously described for the structure of a known type of FIG. 1, directly comparing the values obtained with the gyroscope 30 of FIG. 5 (represented with a solid line) and the values obtained with said structure of a known type (represented with a dashed line).

It may immediately be noted that coupling of the vibration modes of the sensing masses 15 a, 15 b generates at output (after appropriate demodulation with respect to the driving frequency) two contributions of noise at frequencies clearly separate from one another: one, corresponding to the in-phase vibration, has a frequency that is approximately twice that of the other, corresponding to the vibration in phase opposition. In particular, the frequencies of the two contributions of noise are the result of a difference between the corresponding resonance frequency (in phase, and in phase opposition) and the driving frequency.

Furthermore, it may immediately be noted that the aforesaid coupling enables a reduction in the output response of the gyroscope 30 to an external linear acceleration (for example, a noise acceleration) by approximately one hundred times as compared to a traditional solution.

As is shown in FIGS. 8 a and 8 b, the mechanical system has a single peak, linked to the vibration mode in phase opposition, unlike solutions of a known type, which are characterized by a double peak in frequency.

It is consequently clear that the described embodiment enables a considerable improvement of the rejection of the linear-acceleration noises in the plane xy of the sensor. In particular, the frequencies of the two modes of vibration remain substantially unaltered in the presence of process spread, and moreover the differential type reading enables convenient elimination of the undesirable contribution of the in-phase vibration mode.

From the mechanical standpoint, the aforesaid two different vibration modes derive from the different displacement modalities of the sensing masses 15 a, 15 b, during the movement in phase or in phase opposition. In particular, during the movement in phase opposition, the displacement of the sensing masses 15 a, 15 b originates from the deformation both of the elastic coupling elements 32 a, 32 b and of the elastic supporting elements 18, so that the connection body 35 remains substantially still in a central position. During the in-phase movement, the elastic coupling elements 32 a, 32 b undergo a smaller deformation as compared to the movement in phase opposition, the elastic supporting elements 36 (which in the movement in phase opposition were substantially stationary) are also deformed, and the connection body 35 displaces in the radial direction.

The present applicant has, however, found that the gyroscope 30, albeit advantageously enabling rejection of noise linear accelerations, is not altogether free from problems due to the presence of the centrifugal acceleration. The rotation of the driving mass 3 generates in fact a centrifugal acceleration acting on the sensing masses 15 a, 15 b in opposite directions with respect to the radial direction of detection, and hence generates a vibration thereof in phase opposition (in a way similar to the effects of the Coriolis force linked to the yaw angular acceleration that is to be detected). As described in detail in the aforesaid European patent application filed in the name of the present applicant, it may be shown that the centrifugal acceleration causes a contribution of vibration at a frequency that is twice that of the acceleration to be detected so that ideally it is possible to filter its contribution.

However, the present applicant has verified that, in given operating conditions, the centrifugal acceleration, notwithstanding the presence of an adequate filtering stage, can cause a saturation of the amplification stages in the reading electronics, and thus cause in any case errors in the detection of angular accelerations.

In order to solve this problem, a further embodiment of the present disclosure envisages automatic compensation, via an appropriate geometrical configuration of the sensing structure, of the effects of the centrifugal acceleration (i.e., providing an intrinsic mechanical compensation, as an alternative, or in addition, to a compensation made at the reading electronics level).

As is shown in FIG. 9, a second embodiment of the gyroscope, here designated by 30′, differs from the one described previously substantially for a different conformation of the mobile and fixed electrodes, here designated by 20′ and, respectively, 22 a′, 22 b′, and, in the case illustrated, of the sensing masses, here designated by 15 a′, 15 b′.

In particular, this second embodiment envisages a suitable shaping of the mobile electrodes 20′ and at least one between the respective first or second fixed electrode 22 a′, 22 b′, in such a way as to generate, during the rotary driving motion, a capacitive variation of the sensing capacitors able to compensate for a capacitive variation thereof due to the presence of the centrifugal acceleration.

In detail, the sensing masses 15 a′, 15 b′ have in this case a substantially trapezoidal conformation with a window 40 defined inside; mobile electrodes 20′ and the corresponding fixed electrodes 22 a′ (radially more internal to the individual mobile electrode 20′) and 22 b′ (radially more external to the individual mobile electrode 20′) are arranged within the window 40. The window 40 has, in the plane of the sensor xy, the shape of an annulus sector, and the mobile electrodes 20′ and fixed electrodes 22 a′, 22 b′ are substantially arc-shaped.

The mobile electrodes 20′ extend inside the window 40, starting from oblique sides of the respective sensing mass 15 a′, 15 b′. The first and second fixed electrodes 22 a′, 22 b′ associated to each mobile electrode 20′ are set facing it on opposite sides, and are anchored to the substrate 2 a via respective anchorages 42 (see FIG. 10), which are also arranged within the window 40. In particular, two sets of mobile electrodes 20′ and corresponding first and second fixed electrodes 22 a′, 22 b′ are present, each set in a respective half into which the aforesaid window 40 is divided by the radial detection direction.

In greater detail, as illustrated in the progressive enlargements of FIGS. 10, 11 a, and 11 b, each mobile electrode 20′ has a first lateral surface (in particular the surface facing the respective first fixed electrode 22 a′, or, equivalently, the lateral surface radially more internal with respect to the center O) that is shaped according to a suitable pattern, and a second lateral surface (in particular the surface facing the respective second fixed electrode 22 b′, or, equivalently, the lateral surface radially more external with respect to the center O) that is not shaped. In particular, the second lateral surface that is not shaped corresponds to an arc of circumference, whilst the first lateral surface that is shaped has a undulate, substantially sinusoidal, profile (as highlighted by the top plan view in the aforesaid FIGS. 10, 11 a, and 11 b).

Furthermore, whereas the second fixed electrode 22 b′ (radially more external) has both of the lateral surfaces that are not shaped, the first fixed electrode 22 a′ (radially more internal) has both of the lateral surfaces shaped, in particular having one and the same sinusoidal profile, substantially corresponding to the sinusoidal profile of the first lateral surface of the mobile electrode 20′.

In use, the centrifugal acceleration acting on each mobile mass 15 a′, 15 b′, causes (as shown by the arrows) an undesired approach (in so far as it is not associated with the movement of detection of an angular acceleration) of each mobile electrode 20′ towards the corresponding second fixed electrode 22 b′, and a corresponding displacement of the same mobile electrode 20′ away from the corresponding first fixed electrode 22 a′, with a consequent decrease of capacitance of the first sensing capacitor C₁, and an increase of capacitance of the second sensing capacitor C₂ (the increase being greater, in a known way, than the aforesaid decrease, given the non-linearity of the relation between capacitance and distance between the electrodes). However, the movement of rotation of the driving mass 3 also causes a circumferential displacement of the mobile electrode 20′ with respect to the fixed electrodes 22 a′, 22 b′ (as shown by the arrows). Given the suitable shaping of the lateral surfaces of the electrodes constituting its plates, this circumferential displacement causes a total capacitive variation of the first sensing capacitor C₁ (in particular a capacitive increase thereof due to a net approach between the plates) such as to equal and compensate for the variations of the second sensing capacitor C₂ due to the contribution of the centrifugal acceleration. Furthermore, the frequency contribution of the capacitive variation due to the shaping of the electrodes substantially corresponds to the frequency contribution due to the centrifugal acceleration (which, as indicated previously, has a frequency that is twice the detection frequency) so as to enable an effective compensation for the resulting capacitive variations. In other words, via the aforesaid shaping, it is possible to generate a capacitive difference between the sensing capacitors (a difference that is then processed by the reading electronics), which remains substantially constant in the absence of a Coriolis acceleration and thus of an angular acceleration to be detected.

Advantageously, also thanks to the fact that the value of capacitance of the second sensing capacitor C₂ is not affected by the circumferential displacement of the mobile electrode 20′ due to the rotary driving motion, it is easy, via an appropriate mathematical model and appropriate computing algorithms, to determine the shaping parameters (in particular the parameters of the sinusoidal profile, in terms of amplitude and/or period) that allows to obtain a minimization of the capacitive difference ΔC between the sensing capacitors C₁, C₂ due to the centrifugal acceleration. For example, an algorithm (of a known type, here not described in detail herein) of numeric integration of the capacitive variations over the entire surface of the electrodes may be used for this purpose, to determine the parameters of the geometrical shape of the electrodes such as to minimize the capacitive difference ΔC.

In FIG. 12 a, the capacitive variation associated to the mobile electrode 20′ during the driving motion on account of the sole centrifugal acceleration is represented with a solid line, and the capacitive variation associated to the same mobile electrode 20′ caused by the sole shaping of the electrodes previously described is represented with a dashed line. As may be readily noted, the aforesaid capacitive variations are substantially equivalent. Consequently, as illustrated in FIG. 12 b, the compensation error on the resulting capacitive variation (capacitive difference ΔC, given by the difference of the aforesaid capacitive variations) is, thanks to this intrinsic mechanical compensation, substantially zero or in any case negligible. In particular, it may be shown that this intrinsic compensation enables reduction of the noise effect of the centrifugal acceleration by a factor equal to 100.

Although it is clear, it is emphasized that the sinusoidal shape described previously is not the only shape possible to obtain the aforesaid effect, and that other geometrical shapes are equally possible, the parameters of which may again be determined via numeric algorithms (for example, there may be envisaged a shaping with a saw-tooth profile).

A further embodiment of the present disclosure envisages provision of a biaxial or triaxial gyroscope by adding to the previously described detection structure for sensing yaw angular accelerations, a detection structure for sensing pitch and/or roll angular accelerations, substantially as described in the aforesaid patent applications filed in the name of the present applicant.

An example of a triaxial gyroscope thus obtained is shown in FIG. 13, where it is designated by the reference number 30″.

In brief (but reference may be made to the aforesaid patent applications for further details), the gyroscope 30″ (illustrated schematically) in this case comprises a first pair and a second pair of further sensing masses 46 a-46 b and 46 c-46 d, housed within respective through openings in the driving mass 3 and connected thereto via respective elastic elements 47.

The further sensing masses 46 a, 46 b of the first pair are aligned in a first diametric direction x₁, inclined with respect to the first horizontal axis x of the die 2 by an angle of inclination α (considered in a counterclockwise direction), the value of which is comprised between 40° and 50° and preferably is 45°. Likewise, the further sensing masses 46 c, 46 d of the second pair are aligned in a second diametric direction x₂, substantially orthogonal to the first diametric direction x₁, and inclined with respect to the first horizontal axis x by the same angle of inclination α (considered in this case in an opposite direction, i.e., clockwise). Furthermore, the further sensing masses 46 a, 46 b of the first pair are symmetrical to corresponding further sensing masses 46 d, 46 c of the second pair, with respect to an axis of symmetry of the die pads 2 d (coinciding with the second horizontal axis y). For example, the further sensing masses 46 a-46 d are, in plan view, substantially shaped like a radial annulus sector, and constitute acceleration sensors with axis parallel to the vertical axis z. In use, an angular acceleration of pitch or roll generates a Coriolis force on the further sensing masses 46 a-46 d such as to cause a rotation thereof out of the plane of the sensor xy, and an approach towards (or a moving away from) respective detection electrodes facing them and set on the substrate 2 a (represented with a dashed line).

Further anchorages 7 b are also shown in FIG. 13, which are set outside the driving mass 3; the driving mass is anchored to the substrate 2 a via these further anchorages 7 b, to which it is connected by means of further elastic anchorage elements 8 b.

FIG. 14 illustrates an electronic device 50 comprising the microelectromechanical gyroscope 30′ (or 30″) previously described. The electronic device 50 can advantageously be used in a plurality of electronic systems, for example, in inertial navigation systems, in automotive systems or in systems of a portable type, such as, for example: a personal digital assistant (PDA); a portable computer; a cell phone; a digital audio player; a photographic camera or video-camera; or further systems capable of processing, storing, transmitting, and receiving signals and information.

The electronic device 50 further comprises: a driving circuit 51, operatively coupled to the driving assembly 4 for imparting the rotary driving movement on the driving mass 3 and supplying biasing signals to the microelectromechanical structures (in a per-se known manner, here not illustrated in detail); a reading circuit 52, operatively coupled to the sensing capacitors C₁, C₂ of the sensing masses, for detecting the amount of displacement of the sensing masses and hence determining the angular velocity acting upon the structure; and an electronic control unit 54, for example, of a microprocessor type, connected to the reading circuit 52, and designed to supervise the general operation of the electronic device 50, for example, on the basis of the angular velocities detected and determined.

The advantages of the microelectromechanical gyroscope provided according to the present disclosure are clear from the foregoing description.

In particular, it is again emphasized that mechanical coupling via elastic elements of the sensing masses for detecting yaw angular accelerations enables rejection of external acceleration noise (for example, due to environmental noise or other source of noise), even in the presence of process spread.

The particular shaping pattern of the detection electrodes enables compensation and minimization of the effects of the centrifugal acceleration due to the rotary driving movement. In particular, these effects are intrinsically compensated for without requiring any particular additional arrangements within the reading electronics.

Furthermore, the detection structure for detecting yaw accelerations has an architecture that is altogether compatible with a biaxial or triaxial gyroscope, enabling its integration with structures for detecting pitch and/or roll angular accelerations.

Finally, it is clear that modifications and variations may be made to what has been described and illustrated herein, without thereby departing from the scope of the present disclosure.

In particular, it is clear that modifications can be envisaged to the configuration of some of the structural elements of the gyroscope. For example, the sensing masses 15 a′, 15 b′ for detection of yaw angular accelerations can be aligned in a different direction in the plane of the sensor xy (for example, along the first horizontal axis x); a different conformation of the elastic coupling elements 32 a, 32 b and of the connection body 35 may be envisaged; it is possible to shape according to a desired pattern both the first and the second fixed electrodes 22 a′, 22 b′, or else it is possible to shape only the radially-more-external second fixed electrodes 22 b′; both the first and the second fixed electrodes 22 a′, 22 b′ can possibly extend on the outside of the corresponding sensing masses 15 a′, 15 b′, in a way substantially similar to what is illustrated with reference to FIG. 5. More in general, the driving mass 3 may have a different shape, different from the circular one, such as a closed generically polygonal shape, as likewise the shape of the frame 2 b of the die 2 may be different.

Furthermore, the displacement of the sensing masses can be determined with techniques different from the capacitive one, for example, by means of detection of a magnetic force, and the twisting moment for causing oscillation of the driving mass with rotary movement can be generated in a different way, for example, by means of parallel-plate electrodes, or else by magnetic actuation.

The various embodiments described above can be combined to provide further embodiments. All of the U.S. patents, U.S. patent application publications, U.S. patent applications, foreign patents, foreign patent applications and non-patent publications referred to in this specification and/or listed in the Application Data Sheet are incorporated herein by reference, in their entirety. Aspects of the embodiments can be modified, if necessary to employ concepts of the various patents, applications and publications to provide yet further embodiments.

These and other changes can be made to the embodiments in light of the above-detailed description. In general, in the following claims, the terms used should not be construed to limit the claims to the specific embodiments disclosed in the specification and the claims, but should be construed to include all possible embodiments along with the full scope of equivalents to which such claims are entitled. Accordingly, the claims are not limited by the disclosure. 

1. An integrated microelectromechanical structure, comprising: a substrate; a driving mass configured to be actuated in a plane with a driving movement; first and second elastic anchorage elements anchoring the driving mass to the substrate; first and second elastic supporting elements; a first sensing mass and a second sensing mass suspended within said driving mass and respectively coupled to the driving mass via the first and second elastic supporting elements, respectively, the sensing masses being configured to move with said driving mass in said driving movement and being configured to perform respective detection movements in response to an angular movement of the driving mass; and elastic coupling elements coupling the sensing masses to each other and configured to couple modes of vibration of the sensing masses.
 2. The structure according to claim 1, wherein said driving mass is configured to be actuated with a rotary movement in said plane, and said first and second sensing masses are configured to perform the respective linear detection movement in said plane in response to said angular movement; the detection movements of said first and second sensing masses being in phase opposition with respect to one another and in a radial direction.
 3. The structure according to claim 1, wherein the elastic coupling elements include first and second elastic coupling elements respectively associated with said first and second sensing masses, the structure comprising: a connection body having a substantially negligible mass and coupling the first and second elastic coupling elements to each other.
 4. The structure according to claim 3, comprising further elastic supporting elements connected between said connection body and said driving mass.
 5. The structure according to claim 3 wherein said driving mass includes a through opening; said first and second sensing masses, said elastic coupling elements, said further elastic supporting elements and said connection body being arranged within said through opening.
 6. The structure according to claim 1 wherein said elastic coupling elements are configured in such a way that said first sensing mass and second sensing mass have two vibration modes, one in phase and the other in phase opposition, having frequencies that are distinct from one another.
 7. The structure according to claim 1, wherein said driving mass is configured to be actuated with a rotary movement in said plane, the structure including: a first sensing capacitor having: a first mobile electrode fixedly connected to said first sensing mass, and a first fixed electrode facing said first mobile electrode; and a second sensing capacitor having: a second mobile electrode fixedly connected to said second sensing mass, and a second fixed electrode facing said second mobile electrode.
 8. The structure according to claim 7, wherein said first mobile electrode and first fixed electrode have respective faces facing each other, the faces sharing a common shaped profile configured such that a first capacitive variation, generated in said first sensing capacitor by the angular movement of the sensing mass, compensates for a second capacitive variation generated in said first sensing capacitor by a centrifugal acceleration deriving from said driving movement.
 9. The structure according to claim 7, wherein the first fixed electrode has a surface that faces a first surface of the first mobile electrode and the structure includes a third fixed electrode fixed to the first second mass and having a surface that faces a second surface of said mobile electrodes, the first and second surfaces being on opposite sides with respect to a radial direction; the surface one of the first fixed electrode having a shaped profile that matches the first surface of said first mobile electrode.
 10. The structure according to claim 9, wherein said shaped profile is a substantially sinusoidal profile.
 11. The structure according to claim 7, wherein said first and second sensing masses include first and second windows, respective, said first mobile electrode and said first fixed electrode being positioned in the first window and said second mobile electrode and said second fixed electrode being positioned in the second window; said first and second mobile electrodes extending from internal walls of said first sensing mass and second sensing mass, respectively.
 12. The structure according to claim 1 wherein said angular movement is a yaw angular movement about a vertical axis transverse to said plane.
 13. The structure according to claim 1 comprising a first pair and a second pair of further sensing masses, suspended within, and coupled to, said driving mass via respective elastic elements so as to be fixed with respect to the driving mass in said driving movement and to perform a detection movement of rotation out of said plane in response to a first further angular velocity and a second further angular velocity acting, respectively, about a first axis and a second axis that are transverse and belong to said plane; the first pair and the second pair being aligned in respective directions, having inclinations that are non zero and of opposite sign with respect to said first axis.
 14. An electronic device comprising: an integrated microelectromechanical structure that includes: a substrate; a driving mass configured to be actuated in a plane with a driving movement; first and second elastic anchorage elements anchoring the driving mass to the substrate; first and second elastic supporting elements; a first sensing mass and a second sensing mass suspended within said driving mass and respectively coupled to the driving mass via the first and second elastic supporting elements, respectively, the sensing masses being configured to move with said driving mass in said driving movement and being configured to perform respective detection movements in response to an angular movement of the driving mass; and elastic coupling elements coupling the sensing masses to each other and configured to couple modes of vibration of the sensing masses; and a reading stage operatively coupled to said integrated microelectromechanical structure.
 15. The device according to claim 14, wherein said elastic coupling elements are configured in such a way that said first and second sensing masses have two vibration modes, one in phase and the other in phase opposition, having frequencies that are distinct from one another; and wherein said reading stage is configured so as to eliminate a contribution of said in-phase vibration mode.
 16. The device according to claim 14, wherein the structure includes a first sensing capacitor and a second sensing capacitor, the first sensing capacitor including a mobile electrode and a first fixed electrode positioned on a first side of the mobile electrode, the second sensing capacitor including the mobile electrode and a second fixed electrode positioned on a second side of the mobile electrode, the first and second sides being opposite sides with respect to a radial direction; wherein said reading stage is configured to process a capacitive difference between said first and second sensing capacitors.
 17. A method, comprising: forming an integrated micromechanical structure, the forming including: forming a driving mass configured to be actuated in a plane with a driving movement; forming first and second elastic anchorage elements anchoring the driving mass to a substrate; forming first and second elastic supporting elements; forming a first sensing mass and a second sensing mass suspended within said driving mass and respectively coupled to the driving mass via the first and second elastic supporting elements, respectively, the sensing masses being configured to move with said driving mass in said driving movement and being configured to perform respective detection movements in response to an angular movement of the driving mass; and forming elastic coupling elements coupling the sensing masses to each other and configured to couple modes of vibration of the sensing masses.
 18. The method of claim 17, wherein said driving mass is configured to be actuated with a rotary movement in said plane, and said first and second sensing masses are configured to perform the respective linear detection movement in said plane in response to said angular movement; the detection movements of said first and second sensing masses being in phase opposition with respect to one another and in a radial direction.
 19. The method according to claim 17, wherein forming the elastic coupling elements includes forming first and second elastic coupling elements respectively associated with said first and second sensing masses, the method further comprising: forming a connection body having a substantially negligible mass and coupling the first and second elastic coupling elements to each other.
 20. The method according to claim 19, comprising forming further elastic supporting elements connected between said connection body and said driving mass. 